The main research works in this dissertation are as follows : ( 1 ) based on the automatic vision inspection principle and modern inspection requirement , designed a new vision inspection system for microelectronic products ( pvms ) 主要研究工作如下: ( 1 )根據(jù)自動視覺檢測原理和現(xiàn)代檢測要求,設計了適用于微電子產(chǎn)品的新的視覺檢測系統(tǒng)( pvms ) 。
With the development of microelectronic products ( integrated circuit , printed circuit board , etc ) directing to high density , thin separation and low defect ratio , its inspection requirement is higher on aspects of precision , efficiency , universal , and intelligence etc . therefore , this paper researched on the general key techniques in the field of microelectronic products vision inspection , covered the shortage of traditional inspection on aspects of fast and precision locating , image mosaic , and fine defect test , completed theory study on physical dimension and defect inspection of microelectronic products based on machine vision , developed the prototype and used lots of experiments to prove its correctness and feasibility 隨著微電子產(chǎn)品(集成電路芯片、印刷電路板等)向著高密度、細間距和低缺陷方向發(fā)展,對其檢測技術在精密、高效、通用和智能化等方面提出了更高要求。由此,本文對微電子產(chǎn)品視覺檢測中的關鍵技術進行研究,彌補了傳統(tǒng)檢測在精確快速定位、圖像全景組合和精細缺陷檢測等方面的不足,最終完成基于機器視覺的微電子產(chǎn)品外形尺寸和缺陷檢測的理論研究和樣機研制,并進行了大量實驗證明其正確性和可行性,力圖為我國自主創(chuàng)新的微電子產(chǎn)品視覺檢測技術提供理論和實際借鑒。
Nowadays , separation by implantation of oxygen ( simox ) and smart - cut are two major methods to commercially supply soi wafers , but these soi wafers are much expensive than si wafers due to the long time ion implantation required for the high dosage ( 1017 - 10l8cm - 2 ) by conventional beam - line ion implanters , which , to some extent , embarrasses its widespread adoption in mainstream microelectronic products 目前制約soi技術商業(yè)應用的重要因素之一是soi圓片過低的產(chǎn)量和過高的價格,主要原因是使用傳統(tǒng)線掃描式離子注入機需要很長時間才能達到所需的注入劑量( 10 ~ ( 17 ) 10 ~ ( 18 ) cm ~ ( - 2 ) ) 。